1500℃ 튜브전기로 패키지(CVD,annealing) FU-PK-H2 (300mm Ø80)

1500℃ 튜브전기로 패키지(CVD,annealing) FU-PK-H2 (300mm Ø80)

 

1500℃ 튜브전기로 패키지(CVD,annealing) FU-PK-H2 (300mm Ø80)

 

 

 

 

모델	FU-PK-H2
상품요약정보	Chemical Vapor Deposition (CVD, 화학기상증착) 공정용 전기로, annealing(소둔)용 전기로, Gas Flow package+이동형Frame + chiller + 진공펌프로 완변한 구성

Tube Furnace Package

1500℃ Furnace FU-PK-H2 (300mm Ø80)

CVD(화학기상증착) 공정및 annealing(소둔)용 전기로 Full Package

 

Package Model	FU-PK-H2
Furnace Model	SH-FU-80TH-WG
Chiller	SH-WB-5CDR(-15)
Vacuum Pump	SH-V10
Oil Mist Trap	VOT-1020
Table	Moving Frame
Dimension	1265x725x1515mm 49.80x28.54x59.64''
Cat.NO	FUPKH2300

 

Gas Flow Package

1500℃ Furnace SH-FU-80TH (300mm Ø80)

Model		SH-FU-80TH-WG
Furnace		SH-FU-80TH
Components		Gas Flowmeter 1EA
		Stainless Steel Pipe & Connector
		Gas Sealing Mask
		Alumina Tube (Length 1000 mm)
Cat. No.	230 V	FU80THWG230

 

• Safety Device

• -Automatic reset function incoming power cut
• -Buzzer on when set time arrived
• -Over temperature alarm

• Option

• -Gas inlet module 추가
• -가스 연결 서비스

• -MFC, BPR

• -Safty Cover 튜브 안전 덮개

1500°C Tube Furnace

Model	SH-FU-80TH
Max Temp	1500℃ (2732℉)
Temp Controller	Programmable Controller(FC-1000)
Sensor	R type
Applicable Tube Diameter	80 Φ
Heater Capa	6 KW
Dimension Hot Zone	Length 300 mm
Dimension External (W×D×H )	682x517x610mm 26.85x20.35x24.02''
Weight	72 Kg
Heater Element	SIC
Insulation	Ceramic Board & Wool
Electrical Requirements 230V ,50/60Hz, 1Φ	26 A
Cat. No. 50Hz(60Hz)	FU80TH230

 

콤팩트 칠러

3 in 1 Compact Chiller

제품명		콤팩트 칠러 3 in 1 Compact Chiller
Model		SH-WB-5CDR(-15)
Temp Controller		Microprocessor Digital Controller
Temp Range		-15℃ to ambient (based on ambient 25℃ / No load condition)
Cooling Capacity		Holding temp.	Cooling Power
		10℃	980W
		0℃	650W
		-10℃	330W
Recirculating Pump	Max Flow	8L/min. (tested with clean water at 20℃)
	Max Head	3.5meter (tested with clean water at 20℃)
	Water Proof Level	lpx4
Dimension Internal (W×D×H)		200x200x130mm 7.87x7.87x5.12"
Dimension External (W×D×H)		283x400x565mm 11.14x15.75x22.24“
Reservior Capa		5L
Material Internal		Stainless Steel
Material External		Steel Plate with Powder Heating Coated
Electrical Power		230V, 60Hz, 1phase
Net. Weight		26.5kg

 

Vacuum Pump

SH-V Series

Perfect design and performance

고성능의 SH-V series 진공펌프입니다.

실린더 구조와 혁신적인 오일순환 시스템으로 안정적이고 강한 내구성을 자랑합니다.

자동 역흡입방지 밸브(anti-sucking back valve)와 2단계 가스밸러스트 밸브기능으로 최상의 신뢰성을 확보해 줍니다.

• 2단계 조절 가능한 가스밸러스트 밸브는 응결 가능한 증기를 펌프 밖으로 배출할 수 있게 해줌
• 오일 역흡입방지 보호기능으로, 진공시스템이 오일에 오염되는 것을 막아주며,
• 펌프가 운행을 멈추었다가 다시 작동하는데 용이
• 오일 펌프 안의 오일 강제 순환 시스템과 오일 공급 구조로 안정적인 펌프 작동 가능

 

Model	SH-V10
Pumping Speed(50/60Hz)	78L/min
Ultimate total pressure gas ballast close	5x10-2 Pa ( 3.7x10-4 torr )
Ultimate total pressure gas ballast open	3 Pa ( 2.2x10-2 torr )
Power supply	220V,50/60Hz or 110V,50/60Hz
Power rating(kw)	0.4(1 Phase)
Inlet/Exhaust Flange	KF 16/25
Oil capacity(L)	0.6~1.0
Ambient temperature(℃)	5~40
Noise level(dB)	≤56
Weight(kg)	19
Recommended for	Vacuum Drying Ovens (SH-VDO-08NG, SH-VDO-30NG, SH-VDO-70NG, SH-VDO-30NS, SH-VDO-70NS) Tube Furnace All Packages

 

• Option

• Oil Mist Trap with Filter
• VOT-1020 : V10, V20
• VOT-4080 : V40, V60

• Filter for Oil Mist Trap
• VOTF-1020 : VOT-1020
• VOTF-4080 : VOT-4080

​

Flow Rate Characteristic

Dimension

Dimensions

 

Dimensions

Model

A

B

C

D

E

G

H

I

J

K

L

DN

SH-V10

460

144

207

210

110

126

154

45

45

34

/

KF16/25

 

Mass Flow Controller(Multi gas selectable)

• Accessible PID valve tuning for best speed and stability.
• Custom valve orifice sizes: yields full-range stability.
• Control mass flow, vol. flow or pressure with one device.
• No warm-up: ready to control process flows in one second.

 

Model	MC Series	MCS Series	MCSS Series	MCV Series
Type	General	For Toxi Gas	For Toxi Gas (Cl2, SO2, HCl 포함)	For Vacuum
Flow Range	0 ~ 1 slpm / 0 ~ 5 slpm
Mass Flow Accuracy at calibration conditions	±0.6% of reading or ±0.1% of full scale	±0.8% of reading or ±0.2% of full scale
Operating Temperature Range	-10 to +60°C
Temperature Accuracy	±0.75°C
Operating Pressure full scale	145 PSIG
Pressure Accuracy	Above 1 atm: ±0.5% of reading
Typical Indication Response Time	< 10 ms	< 100 ms
Typical Warm-Up Time	<1 Second
Monochrome LCD	Simultaneously displays mass Flow, pressure and temperature	Simultaneously displays mass Flow, Volumetric Flow, pressure and temperature
Mechanical Dimensions (HxWxD)	104.14x91.44x27.94mm / 4.1x3.6x1.1"			121.92x172.72x38.1mm /4.8x6.8x1.5"
Gas Selectable	98 Gas	128 Gas (Cl2, SO2, HCl 제외)	131 Gas (Cl2, SO2, HCl 포함)	98 Gas
Communication	RS-232

 

Gas Select™ Preloaded Gases

Mass Flow Controller(Multi gas selectable)

​

• Accessible PID valve tuning for best speed and stability.
• Custom valve orifice sizes: yields full-range stability.
• Control mass flow, vol. flow or pressure with one device.
• No warm-up: ready to control process flows in one second.

 

Model	BPR Series	BPRV Series	BPRS Series	BPRSS Series
Type	General	For Vacuum(음압용)	For Toxi Gas (CL2, HCl, SO2 제외)	For Toxi Gas (CL2, HCl, SO2 포함)
Pressure Range	1PSIG ~ 15PSIG	0PSIG ~ 1PSIG(0 ~ 760torr)	1PSIG ~ 15PSIG
Standard Accuracy	± 0.25% (≥ 1 psi)
Repeatability	± 0.08% Full Scale
Typical Response Time	< 100 ms
Warm-up Time	< 1 Second
Operating Temperature	-10 to +60℃
Monochrome LCD	Displays Pressure
Mechanical Dimensions (HxWxD)	104.14x91.4x27.94mm / 4.1x3.6x1.1"
Communication	RS-232

 

적용분야

• 우주소재 및 금속재료 생산 산업분야/세라믹, 합금, 타타늄의 열처리를 수행하는 파괴시험 연구, 개발 및 생산
• Destructive testing laboratories who carry heat treatment of ceramic, alloy, titanium and etc for aerospace and metallic production industries.
• 니켈함금과 같은 금속류 분말을 소결하는 연구, 개발 및 생산
• Building companies who transforms metallic power such as nickel alloy into sintered materials by sintering.
• 고분자합성물과 그라핀을 개발하는 재료공학 연구, 개발 및 생산
• Material technology providers who develop polymer composites and graphene materials.
• 가스분위기에서 상온과 고온(1700도)의 반복산화시험을 수행하는 우주항공용 소재 연구,개발 및 생산
• Aerospace companies who perform cyclic oxidation test between high tmep to room temperature in atmosphere-controlled environment.
• 재료의 연소를 통해 성분을 분석해야 하는 의료 연구, 개발
• Medical and healthcare companies who need analysis of ashes and contents through combustion of materials.
• 진공과 가스분위기에서 소결을 해야 하는 재료 혁신 연구, 개발 및 생산
• Material innovation companies who do sintering in vacuum or in inert gases.
• 인코넬 718 튜브를 소결, 소둔, 경화하는 진공전기로가 필요한 해상용 표면 인젝션 시스템 연구, 개발및 생산
• Subsea and surface injection system companies who need vacuum furnace for softening cycles, annealing and age hardening of Inconel 718 tubes.
• 다양한 물질을 열처리시험을 통해 분석하는 연구, 개발
• Analytical research labs who perform various material testing with thermal treatment.
• 합금파우더를 소둔하는 의료용 임플란트 연구, 개발및 생산
• Medical implants manufacturers who anneal alloy powders.
• 고분자세라믹부품의 소결을 하는 대학교 재료 과학 연구,개발
• Material scientists in universities who do sintering materials such as polymer-derived ceramic parts.
• 고체산화연료전지를 가공하는 응용과학기술 분야
• Applied science engineers who process solid oxide fuel cells (SOFC).
• 연소물질이 필요한 환경 화학 연구 분양
• Environmental and chemical researchers who need combustion of materials.
• 위험물질관리, 오염토양복원, 공기오염관리 분야
• Regulatory compliance service providers in the areas of hazardous waste thermal treatment, air permitting, air pollution control, contaminated soil remediation, and hazardous waste management.
• 금속 진공남땜이 필요한 금속부품 생산 분양
• Metallic parts manufacturers who need vacuum brazing and heat treating for steel.
• ASTM D2584에 따라 섬유강화합성물의 유리성분을 시험해야 하는 수질처리 분야
• Water treatment companies who test glass content in FRP (fiber reinforced polymer) products according to ASTM D2584.
• 질화갈륨 반도체 웨이퍼를 소둔하는 반도체 분야
• Semiconductor manufacturers who anneal Gallium nitride (GaN) semiconductor wafer.
• 다공세라믹튜브을 위한 양생과 소결방법을 연구하는 엔지니어링 분양
• Engineering companies who do curing and sintering solutions in porous ceramic tubes.
• 토양연소가 필요한 토목공학 분야
• Civil engineers who need soil combustion.
• 진공조건에서 실리카 웨이퍼를 소둔하는 연구 분야
• University labs who anneal Si wafer in vacuum condition.
• 탄소나노섬유(CNT) 전구의 열처리를 수행하는 화학연구분야
• Chemistry research departments who do the thermal treatments (stabilization in air and carbonization in argon) of carbon nanofiber precursors.
• 해상용 중유의 성분을 분석하는 해상장비제조분양
• Marine equipment manufacturers who analyze ash content in marine HFO (Heavy Fuel Oil).
• 화학증기증착기법(CVD) 을 이용한 그라핀기반재료를 생산하는 그라핀 연구, 개발 및 생산
• Graphene solution companies who produce graphene-based materials by CVD (Chemical Vapor Deposition) method. CVD furnace
• 폴리머, 옥사이드, 인산염, 황화물을 이용한 차세대 고체전지 개발분양
• Solid state battery manufacturer with polymer electrolyte, oxide electrolyte, sulfide electrolyte, phosphate electrolyte and etc.

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1500℃ 튜브전기로 패키지 : 비전랩사이언스

 

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